OTHER SERVICES...
>> REPAIR
>> CALIBRATION
>> EXCHANGE SERVICE
>> REFURBISHMENT
» Thermocouples
» FSI Table
» Reactive Gas Generator
» Chuck
» Bushing
» Novellus Dome Remanufactured
» Heater Block
» Amat Forged Heater
» Susceptors
» Hitachi Ground Electrode
>> ADDITIONAL SERVICES
------------ Novellus Pedestal
-----------
TOOL MODEL
PROCESS
OEM PART NUMBER
Atlus
CVD-W etc
02-033395-00
02-045721-00
02-092691-00
