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------------ Heater Table ------------
 
     
 
New 8 inch Heater tables are available for varies Novellus Tools
  - Material: Al 1050
 
- Process: CVD-W
 
- Machine Maker: ALTUS (NOVELLUS)
 
- Surface Treatment: Bare
 
- Available Temp.: 470°C (±1%) wafer base
 
- Power: 208V, 1750W
 
- Thermocouple: K-type