RETURN to ProductRETURN to Semiconductor IndustryRETURN to New Equipment
 
------------ Bushing ------------
 
     
  New Source Bushings for all the following Implanters and others  
   
  AMAT IMPLANTERS:


-
9000/9200

- 9500

- Quantum III, QX+

- XR80/LEAP




EATON / AXCELIS:


- NV20/GSD/GSD HE

- 8200


- NV/10-80/NV10-160/GSD Ultra

- GSDIII/LED/Ultra/HC3
  VARIAN:


- DF-4/DF-5/CF-4/CF-5/DF-3000/350D/300XP

- 80-10/120-10/120XP


- E220/E500

- E220/E500HP


- 160XP/180XP/VIISion200

- E1000

- Viision

- Vista810XE



Enhancement designs that suits particular needs are also available, for some bushings.