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	------------ Heater Table------------

	New 8 inch Heater tables are available for varies Novellus Tools
	- Material: Al 1050
	- Process: CVD-W
	- Machine Maker: ALTUS (NOVELLUS)
	- Surface Treatment: Bare
	- Available Temp.: 470°C (±1%) wafer base
	- Power: 208V, 1750W
	- Thermocouple: K-type

	- Material: Al 5052
	- Process: Asher
	- Machine Maker: PEP 3510 (GASONICS)
	- Surface Treatment: Anodizing
	- Available Temp.: 300°C (±1%) wafer base
	- Power: 208V, 800W, 2 P
	- Thermocouple: K-type