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	------------ Hitachi ------------

	New 8 inch Heater tables are available
	- Material: Al 6061
	- Process: UVAS (02 plasma)
	- Machine Maker: UA5200 (HITACHI)
	- Surface Treatment: Bare
	- Available Temp.: 300°C (±1%) wafer base
	- Power: 208V, 400W
	- Thermocouple: K-type